Variable height sensor tree

Details Variable height sensor tree Variable height sensor tree

1998-10-09

2001-10-23

Williams, Hezron (Department: 2856)

Measuring and testing

Probe or probe mounting

C073S29000R

Reexamination Certificate

active

06305235

ABSTRACT:

BACKGROUND OF THE INVENTION
1. Field of Invention
The present invention relates to a novel variable position sensor device. The device has particular applicability in setting a sensor, for example, a liquid level or concentration sensor, at a desired location in a chemical holding vessel.
2. Description of the Related Art
In the semiconductor manufacturing industry, extensive use is made of liquid chemicals in wafer cleaning and etching processes. Process tanks and other liquid holding vessels may include one or more sensors to monitor, for example, the level of a liquid or the concentration of a component in a liquid solution contained therein. Conventionally, such sensors have themselves been fixedly attached to the liquid-containing vessel or have otherwise been fixedly attached to sensor holders which in turn are fixed to the vessel. To change the position of the conventional sensor or sensor holder on the vessel, the liquid must be drained from the vessel, holes drilled in the liquid containing vessel at each position at which the sensor is to be placed, and the sensor or sensor holder fixed in place using a suitable fastener.
Relocation of the sensor in the conventional manner described above is inefficient and expensive. In this regard, the sensor cannot be moved to a new position without taking the vessel out of service for a significant period of time to readjust the sensor position. In the case of a semiconductor manufacturing process, cleaning of the vessel is necessary to ensure that the liquid chemical to be contained therein is not contaminated. This cleaning can lead to extensive downtime of a process, which can result in significant expense.
It is, therefore, an object of the present invention to provide a variable height sensor tree which allows for sensor placement and adjustment in a fast and facile manner.
SUMMARY OF THE INVENTION
According to a first aspect of the present invention, a variable position sensor device is provided. The device includes a fixed track attached to a track holder. An adjustable sensor holder is adapted to receive a sensor and is capable of sliding and locking into position on the fixed track.
According to a second aspect of the present invention, a variable position sensor device comprises a holding vessel having a fixed track attached thereto and an adjustable sensor holder adapted to receive a sensor. The adjustable sensor holder is capable of sliding and locking into position on the vertical track.


REFERENCES:
patent: 3289465 (1966-12-01), Parker
patent: 3742245 (1973-06-01), Hallen et al.
patent: 5100298 (1992-03-01), Shibata et al.
patent: 660475 (1965-07-01), None
patent: 9000520 (1990-03-01), None
patent: 9416008 (1994-12-01), None
patent: 0386703 (1990-09-01), None
patent: 2098282 (1972-03-01), None

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