Variable gap device and method of manufacture

Details Variable gap device and method of manufacture Variable gap device and method of manufacture

1985-06-13

1986-10-14

Griffin, Donald A.

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

29 2542, 73705, H01G 518, H01G 700, G01L 900

Patent

active

046176080

ABSTRACT:
A variable gap device which comprises a suitable material with a cavity formed therein mounted over a body. Elements are formed on the surface of the body and on the top surface of the cavity. In one embodiment, the elements are electrodes of a variable capacitance device, and in another embodiment the elements are partial or total reflectors of incident light from an optical fiber. The surface of the cavity opposite the body is preferably flat and of the order of microns from the body.
The device is fabricated by forming a removable layer over a temporary substrate. An appropriate element pattern is formed over the removable layer and the layer is etched in a configuration which will define the cavity. The deformable material is encapsulated over this structure and then removed from the substrate with the element remaining in the cavity. Any removable material remaining in the cavity can then be etched away.

REFERENCES:
patent: 2576489 (1951-11-01), Stovall
patent: 2868894 (1959-01-01), Schultz
patent: 3426209 (1969-02-01), Sihvonen et al.
patent: 3782486 (1974-01-01), Kuhn et al.
patent: 4017495 (1977-04-01), Jaffe et al.
patent: 4151578 (1979-04-01), Bell
patent: 4158310 (1979-06-01), Ho
patent: 4217623 (1980-08-01), Nishino et al.
patent: 4368645 (1983-01-01), Glenn et al.
J. W. Berthold et al., "Fiber Optic Method for Sensing Diaphragm Deflection", SPIE Proceedings, vol. 412, pp. 90-95, (1983).
F. P. Milanovich, "Process, Product and Waste Stream Monitoring with Fiber Optics", ISA International Conference Preprint, pp. 407-418, (1983).

Affiliated with

Also associated with

Rating

Variable gap device and method of manufacture does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Variable gap device and method of manufacture, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Variable gap device and method of manufacture will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1343708