Variable gap device and method of manufacture

Electricity: electrical systems and devices – Electrostatic capacitors – Variable

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29 2542, 73705, H01G 518, H01G 700, G01L 900

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active

046176080

ABSTRACT:
A variable gap device which comprises a suitable material with a cavity formed therein mounted over a body. Elements are formed on the surface of the body and on the top surface of the cavity. In one embodiment, the elements are electrodes of a variable capacitance device, and in another embodiment the elements are partial or total reflectors of incident light from an optical fiber. The surface of the cavity opposite the body is preferably flat and of the order of microns from the body.
The device is fabricated by forming a removable layer over a temporary substrate. An appropriate element pattern is formed over the removable layer and the layer is etched in a configuration which will define the cavity. The deformable material is encapsulated over this structure and then removed from the substrate with the element remaining in the cavity. Any removable material remaining in the cavity can then be etched away.

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patent: 4368645 (1983-01-01), Glenn et al.
J. W. Berthold et al., "Fiber Optic Method for Sensing Diaphragm Deflection", SPIE Proceedings, vol. 412, pp. 90-95, (1983).
F. P. Milanovich, "Process, Product and Waste Stream Monitoring with Fiber Optics", ISA International Conference Preprint, pp. 407-418, (1983).

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