Variable focal length lens comprising micromirrors

Optical: systems and elements – Mirror – Including specified control or retention of the shape of a...

Reexamination Certificate

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C359S291000

Reexamination Certificate

active

10983353

ABSTRACT:
A variable focal length lens consists of many micromirrors with degrees of freedom rotation and/or degrees of freedom translation and actuating components. As operating methods for the lens, the actuating components control the positions of micromirrors electrostatically and/or electromagnetically. The optical efficiency of the variable focal length lens is increased by locating a mechanical structure upholding micromirrors and the actuating components under micromirrors. The lens can correct aberration by controlling each micromirror independently. The lens can also be of a desired arbitrary shape and/or size. The micromirrors are arranged in a flat plane or in a curved plane with a predetermined curvature. The electrodes determining the position of the micromirrors can be made of material with high electrical conductivity, preferably metal. The surface material of the micromirror is made of a material with high reflectivity such as aluminum, silver, and gold, which are coated with multi-layer dielectric material or antioxidant.

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Cho, 2003, “Fast-response Variable Focusing Micromirror Array Lens,” Proceedings of SPIE vol. 5055: 278-286.

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