Coating apparatus – Gas or vapor deposition – Running length work
Reexamination Certificate
2007-07-31
2008-08-12
Moore, Karla (Department: 1792)
Coating apparatus
Gas or vapor deposition
Running length work
C118S033000, C118S050000, C118S719000, C118S733000, C204S298230, C204S298240, C427S171000, C427S172000, C427S255500
Reexamination Certificate
active
07410542
ABSTRACT:
A roll to roll, film forming system overcoming the shortcomings of current roll to roll processing is presented; The roll to roll enabled cartridge is loaded with a bolt of fresh flexible substrate. A skate couples with a cartridge, forms a seal with the cartridge's bottom aperture and drives the cartridge along a rail to an array of deposition heads. A head mates with the cartridge top forming a pressure seal around the variable area deposition aperture. The mating of the skate, cartridge and head form a pressure vessel wherein a film forming environment may be maintained. As the substrate advances past the deposition aperture a layer is formed, potentially from bolt end to bolt end. Device growth continues from one head to another, as grown device encapsulation seal inclusive, aperture environmental seals applied, labeled cartridge is routed to dock, skate returns to system start.
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Arias del Cid Armando Martin
Nolan Paul Terrance
Fischer Felix L.
Moore Karla
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