Valves and valve actuation – Electrically actuated valve – Having element dimensionally responsive to field
Patent
1998-06-16
2000-09-19
Lee, Kevin
Valves and valve actuation
Electrically actuated valve
Having element dimensionally responsive to field
251902, F16K 3102
Patent
active
061200042
ABSTRACT:
Variable capillary apparatus and motion error compensation method using the same. The apparatus has upper and lower bodies and a leaf spring inserted therebetween. Between a lower center portion of the upper body and the spring, there is formed a capillary having a fine gap. The compensating method has the steps of installing a couple of hydrostatic bearings connected to the variable capillary apparatuses to one side of a table, installing a couple of hydrostatic bearings connected to fixed capillaries to the other side of the table, determining gains of the variable capillary apparatuses, detecting a motion error of the table by moving the table, and applying varying voltages to the variable capillary apparatuses for compensating for the motion error. The apparatus and compensating method compensate for the motion error due to geometrical errors of the table and guide rails by varying the gap of the capillary of the apparatuses.
REFERENCES:
patent: 2887294 (1959-05-01), Hahn
patent: 3174716 (1965-03-01), Salter
patent: 4284263 (1981-08-01), Newcomb
patent: 5092360 (1992-03-01), Watanabe et al.
Lee Hu-Sang
Park Chun-Hong
Korea Institute of Machinery and Materials
Lee Kevin
LandOfFree
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