Variable capacitor using resistor generated heat to control diel

Details Variable capacitor using resistor generated heat to control diel Variable capacitor using resistor generated heat to control diel

1997-11-18

2000-03-07

Fahmy, Wael

Active solid-state devices (e.g., transistors, solid-state diode

Voltage variable capacitance device

With physical configuration to vary voltage dependence

257595, 257312, 438379, H01L 2993, H01L 27108, H01L 2120

Patent

active

060344148

ABSTRACT:
The invention discloses a variable capacitor including a first storage electrode, a second storage electrode, and a variable length means coupled therebetween. The capacitance can be adjusted by varying a dielectric space therebetween according with an electrical input. The method for manufacturing a variable capacitor in an integrated circuit includes the steps of forming a first storage electrode, a first dielectric layer, a second dielectric layer, a pair of contact channels, and a second sacrificial layer. The method further includes forming a third sacrificial layer, a second storage electrode, a resistor pattern, a passivation layer, and etching the third, the second, and the first sacrificial layer for having a dielectric space between the first storage electrode and the second storage electrode.

REFERENCES:
patent: 3749986 (1973-07-01), Sauthier
patent: 3999142 (1976-12-01), Presser et al.
patent: 4483194 (1984-11-01), Rudolf
patent: 4495820 (1985-01-01), Shimada et al.
patent: 4674319 (1987-06-01), Muller et al.

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