Variable capacitor single-electron transistor including a...

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Heterojunction

Reexamination Certificate

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C257S025000, C257S027000, C257SE29168

Reexamination Certificate

active

07619241

ABSTRACT:
The present invention provides a single-electron transistor device100. The device comprises a source105and drain110located over a substrate115and a quantum island120situated between the source and drain, to form tunnel junctions125, 130between the source and drain. The device further includes a fixed-gate electrode135located adjacent the quantum island120. The fixed-gate electrode has a capacitance associated therewith that varies as a function of an applied voltage to the fixed-gate electrode. The present invention also includes a method of fabricating a single-electron device300, and a transistor circuit800that include a single-electron device810.

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patent: 5963471 (1999-10-01), Ohata et al.
patent: 6444546 (2002-09-01), Lee et al.
patent: 6844566 (2005-01-01), Wasshuber
patent: 2003/0209739 (2003-11-01), Hisamoto
patent: 696065 (1996-02-01), None
Wilde et al.; Measurements of Single Electron Transistor Devices Combined with a CCC: Progress Report; IEEE Transactions on Instrumentation and Measurement, vol. 50, No. 2; Apr. 2001; pp. 231-234.
Inokawa et al.; A Multiple-Valued Logic with Merged Single-Electron and MOS Transistors; International Electron Devices Meeting,2001. IEDM Technical Digest.; Dec. 2-5, 2001; pp. 7.2.1-7.2.4.
De Wilde, Yannick, et al., “Measurements of single electron transistor devices combined with a CCC: progress report,” IEEE Transactions on Instrumentation and Measurement, vol. 50, Issue 2, Apr. 2001, pp. 231-234.
Kim, Dae Hwan, et al., “Silicon single-electron transistors with sidewall depletion gates and their application to dynamic single-electron transistor logic,” IEEE Transactions on Electron Devices, vol. 49, Issue 4, Apr. 2002, pp. 627-635.

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