Variable capacitor single-electron device

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is – Tunneling through region of reduced conductivity

Reexamination Certificate

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Details

C257SE29322, C257SE21404, C257SE39013

Reexamination Certificate

active

10960239

ABSTRACT:
The present invention provides a single-electron transistor device100. The device comprises a source105and drain110located over a substrate115and a quantum island120situated between the source and drain, to form tunnel junctions125, 130between the source and drain. The device further includes a fixed-gate electrode135located adjacent the quantum island120. The fixed-gate electrode has a capacitance associated therewith that varies as a function of an applied voltage to the fixed-gate electrode. The present invention also includes a method of fabricating a single-electron device300, and a transistor circuit800that include a single-electron device810.

REFERENCES:
patent: 5963471 (1999-10-01), Ohata et al.
patent: 6444546 (2002-09-01), Lee et al.
patent: 6844566 (2005-01-01), Wasshuber
patent: 2003/0209739 (2003-11-01), Hisamoto et al.
patent: 696065 (1995-06-01), None
De Wilde, Y.; Gay, F.; Piquemal, F.P.M.; Geneves, G.; “Measurements of single electron transistor devices combined with a CCC: progress report”, Instrumentation and Measurement, IEEE Transactions on, vol. 50, Issue 2, Apr. 2001 pp. 231-234.
Dae Hwan Kim; Suk-Kang Sung; Kyung Rok Kim; Jong Duk Lee; Byung-Gook Park; Bum Ho Choi; Sung Woo Hwang; Doyeol Ahn; “Silicon single-electron transistors with sidewall depletion gates and their application to dynamic single-electron transistor logic”, Electron Devices, IEEE Transactions on, vol. 49, Issue 4, Apr. 2002 pp. 627-635.

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