Variable capacitor having a rigidity-increasing feature

Electricity: electrical systems and devices – Electrostatic capacitors – Variable

Reexamination Certificate

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C361S277000

Reexamination Certificate

active

07006342

ABSTRACT:
A variable capacitor. The variable capacitor has a movable capacitor electrode including a major surface and a fixed capacitor electrode including a major surface. The major surface of the fixed capacitor electrode is opposite the major surface of the movable capacitor electrode and is separated therefrom by a gap. The major surface of the movable capacitor electrode includes a rigidity-increasing feature. The rigidity-increasing feature further provides a capacitance-increasing topography and reduces snap-together of the capacitor electrodes.

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patent: 2003/0210511 (2003-11-01), Sakai et al.
Jun-Bo Yoon, et al.; “A High-Q Tunable Micromechanical Capacitor with Movable Dielectric for RF Applications”; Technical Digest, IEEE Int. Electron Devices Meeting; pp. 489-492, Dec. 2000.
Nathan Bushyager, et al.; “A Novel Adaptive Approach to Modeling MEMS Tunable Capacitors Using MRTD and FDTD Techniques”, no date.
Darrin Young, et al.; “A Monolithic Micromachined RF Low-Noise VCO”; http://buffy.eecs.berkeley.edu/iro/summary/97abstracts/dyoung.1.html; pp. 1-3, Dec. 2002.
Aleksander DEC, et al.; “Micromachined Electro-Mechanically Tunable Capacitors and Their Applications to RF IC'S”; IEEE Transactions on Microw ave Theory and Techniques, vol. 46, No. 12, Dec. 1998; pp. 2587-2596.

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