Variable capacitor employing MEMS technology

Details Variable capacitor employing MEMS technology Variable capacitor employing MEMS technology

2009-07-24

2011-10-18

Warren, Matthew E (Department: 2815)

Active solid-state devices (e.g., transistors, solid-state diode

Integrated circuit structure with electrically isolated...

Passive components in ics

C257S595000, C257SE29167, C257SE29343, C257SE29344

Reexamination Certificate

active

08039922

ABSTRACT:
When a positive voltage of V1is applied to a drive capacitor with a braking voltage V2at 0V, a moveable electrode moves toward the drive electrode, and a capacitance C of a tunable capacitor becomes smaller. When the braking voltage V2is applied a lower portion brake electrode of the brake capacitor moves in a horizontal direction, such that the inter electrode separation distance between an upper portion brake electrode and the lower portion brake electrode becomes 0 μm. The moveable electrode configured integrally formed with the lower portion brake electrode also moves in the horizontal direction, and the inter electrode separation distance between the moveable electrode and a fixed electrode becomes 0 μm. Since the two electrodes make contact with each other with a dielectric layer interposed therebetween, the position of the moveable electrode can be stably maintained by frictional force between the electrodes.

REFERENCES:
patent: 6497141 (2002-12-01), Turner et al.
patent: 7075701 (2006-07-01), Novotny et al.
patent: 2008/0170742 (2008-07-01), Trusov et al.
patent: 2009/0320591 (2009-12-01), Johnson
patent: 2005-224934 (2005-08-01), None
patent: 2005-341788 (2005-12-01), None
patent: 2006-518926 (2006-08-01), None
patent: 2006-261480 (2006-09-01), None

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