Variable capacitor and manufacturing method thereof

Details Variable capacitor and manufacturing method thereof Variable capacitor and manufacturing method thereof

2006-08-16

2008-11-04

Ha, Nguyen T (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S272000, C361S283100, C361S290000, C361S292000

Reexamination Certificate

active

07446994

ABSTRACT:
A lower movable electrode35, having line sections35a, 35aon both ends and a capacitor section35bin the center, and an upper movable electrode37, having line sections37a, 37aon both ends and a capacitor section37bin the center, are placed so that the capacitor sections35b, 37bface each other, and drive electrodes of lower-movable-electrode actuators27a, 27b, 27c, 27ddriving the lower movable electrode35and upper-movable-electrode actuators29a, 29b, 29c, 29ddriving the upper movable electrode37are electrically separated from the lower movable electrode35and upper movable electrode37. These actuators27ato27dand/or29ato29dmove the lower movable electrode35and/or upper movable electrode37to adjust the distance between both capacitor sections35b, 37b, and control the electrostatic capacity.

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Jae Y. Park et al, “Micromachined RF MEMS Tunable Capacitors Using Piezoelectric Actuators”, IEEE International Microwave Symposium, 2001.

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