Variable capacitance membrane actuator for wide band tuning...

Details Variable capacitance membrane actuator for wide band tuning... Variable capacitance membrane actuator for wide band tuning...

2007-01-09

2007-01-09

Ha, Nguyen T. (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S272000, C361S277000, C361S278000, C361S287000, C361S292000, C333S026000, C333S034000

Reexamination Certificate

active

11041159

ABSTRACT:
A device for varying the capacitance of an electronic circuit is disclosed. The device comprises a flexible membrane located above the electronic circuit, a metal layer connected to the flexible membrane, and bias circuitry located above the membrane. Variation of the capacitance of the electronic circuit is obtained by pulling the membrane upwards by means of the bias circuitry. The disclosed device provides a sizeable capacitance variation and high Q factor, resulting in overall low filter insertion loss. A nearly constant group delay over a wide operating bandwidth is also obtained.

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