Variable capacitance element

Details Variable capacitance element Variable capacitance element

2006-05-30

2006-05-30

Dinkins, Anthony (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S278000, C361S298300, C361S299500, C333S185000

Reexamination Certificate

active

07054132

ABSTRACT:
A variable capacitance element includes a movable element provided above a substrate using supporting portions and support beams so as to be displaced from the substrate. An insulating film and a movable electrode are provided on a conductor facing surface of the movable element. A driving electrode is arranged to displace the movable element, between a signal cutoff position and a signal passage position, whereby a high frequency signal transmitted through a transmission line is cut off or allowed to pass. The insulating film uses compressive stress to warp the movable element and the movable electrode in a direction of warping in a convex form toward the transmission line, and maintains this warping direction.

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Offical Communication issued on Aug. 16, 2005, by the European Patent Office In the corresponding European Application No. 04747111.5.

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