Variable capacitance diode device and method of manufacturing sa

Active solid-state devices (e.g. – transistors – solid-state diode – Voltage variable capacitance device – With specified dopant profile

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257601, 257602, H01L 2993

Patent

active

058250751

ABSTRACT:
When a variable capacitance diode device is formed on each of chips obtained by cutting off a wafer, the capacitance values of the diode devices formed on the chips disperse for each wafer due to change in the manufacturing process conditions. To reduced the dispersion in capacitance value of the diode devices, a plurality of variable capacitance diodes (10A, 10B and 10C) are formed on the same semiconductor chip (2) in such a way that the areas of the PN junctions (4A, 4B and 4C) of the respective diodes are different from each other. Further, only one variable capacitance diode (e.g., 10C) which can satisfy a predetermined strict standard is selected and connected to a terminal (11) for use.

REFERENCES:
patent: 4456917 (1984-06-01), Sato et al.
patent: 4529994 (1985-07-01), Sakai
patent: 5220193 (1993-06-01), Kasahara et al.
patent: 5225708 (1993-07-01), Kasahara

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