Variable annular illuminator for photolithographic projection im

Details Variable annular illuminator for photolithographic projection im Variable annular illuminator for photolithographic projection im

1995-08-17

1998-05-26

Sember, Thomas M.

Photocopying

Projection printing and copying cameras

Illumination systems or details

362268, 362282, G03B 2754

Patent

active

057574707

ABSTRACT:
The illumination of a photolithographic projection imager is given a variable annular intensity profile by using diverging and counter diverging elements that are movable relative to each other in the illumination path. An upstream element diverges the illumination into an annular configuration, the radius of which is set by the distance downstream to the counter diverging element. Convex and concave conical surfaces on the movable elements can accomplish this.

REFERENCES:
patent: 4492439 (1985-01-01), Clegg
patent: 4780747 (1988-10-01), Suzuki et al.
patent: 5113244 (1992-05-01), Curran
patent: 5173799 (1992-12-01), Tanuma
patent: 5245384 (1993-09-01), Mori
patent: 5287142 (1994-02-01), Kamon
patent: 5305054 (1994-04-01), Suzuki et al.
patent: 5309198 (1994-05-01), Nakagawa
patent: 5329336 (1994-07-01), Hirano et al.
patent: 5333035 (1994-07-01), Shiraishi
patent: 5383000 (1995-01-01), Michaloski et al.
"0.25 .mu.m Lithography Using a Deep-UV Stepper with Annular Illumination" by A. Yen, W.N. Partlo, R.W. McCleary, and M.C. Tipton, Presented at Microcircuit Engineering 92, Erlangen, Germany, in Jun. '92, for Publication in Proceedings of Same.
"Polarization Effects of Axicons" by David Fink, in Applied Optics, Mar. 1979, pp. 581-582 (vol. 18, No. 5).
"Mirror System for Uniform Beam Transformation in High-Power Annular Lasers" by J.W. Ogland, in Applied Optics, Sep. 1978, vol. 17, No. 18, pp. 2917-2923.

Affiliated with

Also associated with

Rating

Variable annular illuminator for photolithographic projection im does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Variable annular illuminator for photolithographic projection im, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Variable annular illuminator for photolithographic projection im will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1968542