Varactors including interconnect layers

Details Varactors including interconnect layers Varactors including interconnect layers

2008-07-02

2010-10-05

Ha, Nguyen T (Department: 2831)

Electricity: electrical systems and devices

Electrostatic capacitors

Variable

C361S273000, C361S278000, C361S283300, C361S290000, C361S292000

Reexamination Certificate

active

07808765

ABSTRACT:
In an embodiment of the present invention is provided a varactor comprising a substrate, a bottom electrode positioned on a surface of the substrate, a tunable dielectric material positioned adjacent to and extending over the bottom electrode forming a step and in contact with a top electrode, and an interconnect layer in contact with the bottom electrode, the tunable dielectric and the top electrode.

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