Varactors and methods of manufacture and use

Details Varactors and methods of manufacture and use Varactors and methods of manufacture and use

2008-02-06

2010-10-05

Garber, Charles D (Department: 2812)

Semiconductor device manufacturing: process

Having magnetic or ferroelectric component

C257SE21009, C257SE21013, C372S020000

Reexamination Certificate

active

07807477

ABSTRACT:
In an embodiment of the present invention is provided a method of manufacturing a varactor, comprising providing a substrate; positioning a bottom electrode on a surface of the substrate; placing a tunable dielectric material adjacent to and extending over the bottom electrode forming a step and in contact with a top electrode; placing an interconnect layer in contact with the bottom electrode, the tunable dielectric and the top electrode.

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