Varactor, in particular for radio-frequency transceivers

Active solid-state devices (e.g. – transistors – solid-state diode – Voltage variable capacitance device – Plural diodes in same non-isolated structure – or device...

Reexamination Certificate

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C257S598000, C257S313000

Reexamination Certificate

active

06400001

ABSTRACT:

TECHNICAL FIELD
The present invention relates to a varactor, and in particular, a varactor for radio frequency transceivers.
BACKGROUND OF THE INVENTION
As known, varactors are electronic devices having a variable capacity, selectable in particular through a biasing voltage, applied between a pair of terminals.
Varactors are used, for example, for tuning LC circuit radio-frequency transceivers. In fact, these circuits are adversely affected by production inaccuracies, and by the low quality factor of the passive components, and thus, in use, require adaptation of the actual reactance value, to adjust it to the planned values.
For this purpose a POS (Polysilicon-Oxide-Semiconductor) varactor has been recently proposed, described for example in the article “A ±30% Tuning Range Varactor Compatible with future Scaled Technologies”, by R. Castello, P. Erratico, S. Manzini, F. Svelto, VLSI Symp. on Circuits, Dig. Techn. Papers, June 1998, pp. 34-35, and illustrated in FIG.
1
. In detail, a varactor
1
is formed in a wafer
2
, only partially shown for easy of representation, comprising a substrate
3
, of P-type, having a surface
8
and accommodating a well
4
of N

type. In turn, the well
4
accommodates two biasing regions
5
a
and
5
b
, of N
+
type, spaced from one another (but electrically connected, as shown in
FIG. 1
, by an electrical connection
20
) and bias the well
4
to voltage V
N
.
A gate region
6
, made of polycrystalline silicon, extends above surface
8
of wafer
2
, at an intermediate wafer portion
7
between biasing regions
5
a
and
5
b
, and is electrically isolated from the wafer portion
7
by a gate oxide region
9
. The gate region
6
is biased to a voltage V
G
, via an electrical connection line
21
.
As apparent to those skilled in the art, the conductivity of the wafer portion
7
depends on the voltage difference V
VAR
=V
G
−V
N
existing between gate region
6
and well
4
. In particular, when the gate region
6
is biased to a positive voltage V
G
, charges (electrons) are accumulated in the wafer portion
7
and the capacity of the varactor
1
increases to a value CMAX, beyond which it remains constant, and can no longer be modulated. This capacity value CMAX, equivalent to the capacity of gate oxide layer
9
, is reached for values of V
VAR
slightly higher than 0 V (for example 0.3 V-0.4 V). If, on the other hand, voltage V
VAR
is negative, a depletion region
10
is formed in the wafer portion
7
, the depth whereof increases along with the absolute value of inverse voltage V
VAR
, thus causing the capacity of the varactor
1
to decrease down to a minimum value CMIN, when the inverse voltage V
VAR
reaches a negative threshold value V
T
(for example of approximately −1.6 V). In fact, below the threshold value V
T
, in the wafer portion
7
, next to the surface
8
of the wafer
2
, an inversion layer
11
is formed, comprising minority carriers (here gaps), thermally generated in the depletion region
10
. The wafer portion
7
thus defines a capacity modulation region. For example, in a typical MOS process, CMAX is approximately equivalent to 500 nF/cm
2
, and CMIN is approximately equivalent to 250 nF/cm
2
.
However, the present production technology for integrated transceivers requires more extensive variability.
SUMMARY OF THE INVENTION
An embodiment of the present invention provides a varactor, the capacity of which can be modified within a wider range than those obtained at present.
According to the present invention, an embodiment of a varactor is provided, as defined in the claims.


REFERENCES:
patent: 3519897 (1970-07-01), Ferrell
patent: 3562608 (1971-02-01), Gallagher
patent: 4456917 (1984-06-01), Sato
patent: 4704625 (1987-11-01), Lee
patent: 0 633 612 (1995-01-01), None
patent: 60137053 (1985-07-01), None
patent: 61102766 (1986-05-01), None
patent: WO 97/32343 (1997-09-01), None
Castello et al., “A+/−30% Tuning Range Varactor Compatible with future Scaled Technologies,” 1998 Symposium on VLSI Circuits, Digest of Technical Papers, Jun. 11-13, 1998, pp. 34-35.

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