Vaporizing material at a uniform rate

Details Vaporizing material at a uniform rate Vaporizing material at a uniform rate

2011-08-02

2011-08-02

Meeks, Timothy H (Department: 1715)

Coating processes

Coating by vapor, gas, or smoke

Reexamination Certificate

active

07989021

ABSTRACT:
A method of vaporizing material at a uniform rate for forming a layer on a substrate includes feeding a column of vaporizable material from a temperature controlled region maintained below the vaporizable material's effective vaporization temperature to a source of vaporization energy, wherein the volume of the column can vary during vaporization; and providing a source of vaporization energy delivering a constant heat flux to the surface of the column so that a uniform volume per unit time of the vaporizable material is vaporized to form the layer on the substrate, irrespective of the feeding rate.

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