Vaporizer system for ion source

Details Vaporizer system for ion source Vaporizer system for ion source

1987-05-15

1988-12-13

Goldberg, E. A.

Electric heating

Heating devices

Resistive element: igniter type

219272, F22B 128

Patent

active

047912731

ABSTRACT:
A vaporizer system for an ion source includes a radiation source positioned on the vaporizer axis for providing radiation, multiple crucibles radially spaced from the axis and circumferentially spaced from each other and a reflector rotatable about the axis for directing radiation from the source at a selected one of the crucibles. The radiation causes heating of the selected crucible and vaporization of a solid source material contained therein. The radiation source is a visible and/or infrared emitting lamp such as a quartz halogen lamp. The crucibles are thermally isolated from each other by a heat shield so that the selected crucible is heated while the others remain relatively cool.

REFERENCES:
patent: 2862441 (1958-12-01), Schmall
patent: 3155813 (1964-11-01), Morian, Jr.
patent: 3619562 (1971-11-01), Jacobs
patent: 3869675 (1975-03-01), Patz
patent: 4015029 (1977-03-01), Elchisak
patent: 4328763 (1982-05-01), Sommerkamp et al.
patent: 4503087 (1985-03-01), Russo
patent: 4532412 (1982-07-01), Birocchi
patent: 4571486 (1986-02-01), Arai et al.

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