Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Patent
1980-05-01
1982-05-11
Smith, John D.
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
118715, 219271, 4272557, C23C 1312
Patent
active
043287638
ABSTRACT:
A vaporizer for vacuum deposition installations has at least one crucible and a plurality of crucible-receiving recesses movable into a vaporizing position, a vapor-conducting device and a shutter for interrupting the flow of vapor. The vaporizer is capable of enabling a plurality of different substances to be vaporized in succession without mutual contamination by providing the vapor-conducting device wherein the device has a plurality of vapor screens which can be individually set down at the edges of the crucible-receiving recesses by relative movement between the vapor-conducting device and the crucible. The shutters have a plurality of lobes which can be individually moved over the particular vapor screen located in the vaporizing position. The drives associated with the vapor-conducting device and shutter are interconnected such that the same vapor screen and the same shutter lobe are always associated with a particular crucible-receiving recess.
REFERENCES:
patent: 3227133 (1966-01-01), Anderson et al.
patent: 3575133 (1971-04-01), Van Audenbove et al.
patent: 3853091 (1974-12-01), Christensen et al.
patent: 3856557 (1974-12-01), Cuttell et al.
patent: 4217856 (1980-08-01), Kraus
Heil Walter
Sommerkamp Peter
Leybold-Heraeus
Plantz Bernard E.
Smith John D.
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