Coating apparatus – Gas or vapor deposition – Crucible or evaporator structure
Reexamination Certificate
2002-12-05
2010-06-29
Hassanzadeh, Parviz (Department: 1792)
Coating apparatus
Gas or vapor deposition
Crucible or evaporator structure
C118S715000
Reexamination Certificate
active
07744698
ABSTRACT:
Disclosed is a vaporizer constituted of a dispersing section8and a vaporizing section22. The dispersing section8comprises a gas introduction port4for introducing a carrier gas3under pressure into a gas passage, means for feeding raw material solutions5aand5bto the gas passage, and a gas outlet7for delivering the carrier gas containing the raw material solutions to the vaporizing section22. The vaporizing section22comprises a vaporizing tube20having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet7of the dispersing section8, and heating means for heating the vaporizing tube20. The vaporizing section22serves to heat and vaporize the raw material solution containing carrier gas3delivered from the dispersing section8. The dispersing section8includes a dispersing section body1having a cylindrical hollow portion, and a rod10having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod10has a spiral groove60formed in the external periphery closer to the vaporizing section22, the rod i0being inserted into the cylindrical hollow portion.
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Doi Mikio
Fukagawa Mitsuru
Kanno Yoichi
Kusuhara Masaki
Meguro Toshikatu
Dhingra Rakesh
Hassanzadeh Parviz
Kabushiki Kaisha Watanabe Shoko
Toda Masayuki
Young & Thompson
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