Electric resistance heating devices – Heating devices – Vaporizer
Reexamination Certificate
2005-08-16
2005-08-16
Paik, Sang Y. (Department: 3742)
Electric resistance heating devices
Heating devices
Vaporizer
C261S142000
Reexamination Certificate
active
06931203
ABSTRACT:
Disclosed is a vaporizer constituted of a dispersing section8and a vaporizing section22.The dispersing section8comprises a gas introduction port4for introducing a carrier gas3under pressure into a gas passage, means for feeding raw material solutions5aand5bto the gas passage, and a gas outlet7for delivering the carrier gas containing the raw material solutions to the vaporizing section22.The vaporizing section22comprises a vaporizing tube20having one end connected to a reaction tube of the MOCVD system and having the other end connected to the gas outlet7of the dispersing section8,and heating means for heating the vaporizing tube20.The vaporizing section22serves to heat and vaporize the raw material solution containing carrier gas3delivered from the dispersing section8.The dispersing section8includes a dispersing section body1having a cylindrical hollow portion, and a rod10having an outer diameter smaller than the inner diameter of the cylindrical hollow portion. The rod10has a spiral groove60formed in the external periphery closer to the vaporizing section22,the rod10being inserted into the cylindrical hollow portion.
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Doi Mikio
Fukagawa Mitsuru
Kanno Yoichi
Kusuhara Masaki
Meguro Toshikatu
Kabushiki Kaisha Motoyama Seisakusho
Knuth Randall J.
Paik Sang Y.
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