Vaporizer for ion source

Details Vaporizer for ion source Vaporizer for ion source

2005-04-12

2005-04-12

Lee, John R. (Department: 2881)

Radiant energy

Ion generation

With sample vaporizing means

C250S42300F, C250S424000, C315S111810

Reexamination Certificate

active

06878945

ABSTRACT:
A vaporizer is provided for delivering a solid source, such as arsenic for example that is vaporized in a crucible, into an arc chamber through a nozzle. The vaporizer includes a nozzle formed with a gas inlet port formed in upward orientation and located downward from the upper end of the inner surface of the crucible. Here, when the crucible has an inner diameter of 26 mm for example, the gas inlet port is preferably formed at a position approximately 1.1 mm below the upper end of the inner surface of the crucible, thereby facilitating the introduction of the gas from the gas inlet port and preventing clogging of the nozzle.

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