Vaporizer for delivery of low vapor pressure gases

Details Vaporizer for delivery of low vapor pressure gases Vaporizer for delivery of low vapor pressure gases

2008-08-26

2009-11-17

Bushey, Scott (Department: 1797)

Gas and liquid contact apparatus

With external supply or removal of heat

Temperature or humidity sensor

C261S131000, C261S104000, C261SDIG065

Reexamination Certificate

active

07618027

ABSTRACT:
A vaporizing device is provided for control, delivery, and purification of low vapor pressure gases in conjunction with carrier gas in micro-electronics and other critical applications.

REFERENCES:
patent: 7156380 (2007-01-01), Soininen
patent: 2004/0056368 (2004-03-01), Hirahara et al.
patent: 2005/0066893 (2005-03-01), Soininen
patent: 2006/0125129 (2006-06-01), Takamatsu et al.

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