Vaporizer delivery ampoule

Details Vaporizer delivery ampoule Vaporizer delivery ampoule

2005-07-26

2005-07-26

Bushey, Scott (Department: 1724)

Gas and liquid contact apparatus

Fluid distribution

Systems

C261S142000, C261S147000, C261SDIG006, C034S211000, C034S380000, C034S497000, C034S510000, C118S726000

Reexamination Certificate

active

06921062

ABSTRACT:
A vaporizer delivery system for use in semiconductor manufacturing processes including a plurality of vertically stacked containers for holding a vaporizable source material. Each of the vertically stacked containers includes a plurality of vented protuberances extending into the interior of the each stacked container thereby providing channels for passage of a carrier gas between adjacent vertically stacked containers.

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