Vaporizer crucible for vacuum vapor-deposition

Details Vaporizer crucible for vacuum vapor-deposition Vaporizer crucible for vacuum vapor-deposition

1983-07-07

1985-07-16

Pellinen, A. D.

Industrial electric heating furnaces

Electron beam furnace device

Vaporizing furnace

219121EL, 373 10, H01J 37305

Patent

active

045301000

ABSTRACT:
A vaporizer crucible for vacuum vapor-deposition apparatus, comprises a metallic body 1 having a recess 2 for accommodating vaporizing material and connected in a thermally-conductive manner to a cooling duct 7 which surrounds the recess 2 at least partially. For effectively preventing reduction in heat transfer in the event of the formation of vapor bubbles in the cooling medium at least one guide device 22 for imparting a swirling motion to the cooling medium flowing in the cooling duct 7 is provided in said duct. The guide device 22 preferably takes the form of a spiral element matching the path of the cooling duct.

REFERENCES:
patent: 3360600 (1967-12-01), DuBois
patent: 3414655 (1968-12-01), Allen

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