Vaporizer boat for metal vaporizing

Details Vaporizer boat for metal vaporizing Vaporizer boat for metal vaporizing

1998-06-08

2000-09-19

Beck, Shrive

Heating

Accessory means for holding, shielding or supporting work...

Openwork tray, basket, or grid structure for heat treating...

432253, 432262, 432263, 432264, 266900, 266275, C21D 900

Patent

active

06120286&

ABSTRACT:
The invention concerns a resistance-heated vaporizer boat for vaporizing metal. According to the invention, a reduced temperature is generated in the edge region, i.e., along the longitudinal edge of the vaporizer boat, such that there is only a very slight wetting tendency along this longitudinal edge. Consequently, the melt can be localized such that it cannot overflow over the longitudinal edges of the vaporizer boat, without a cavity necessarily having to be provided in the vaporization surface of the vaporizer boat. As a result, optimum wetting and constantly targeted vaporization of the metal upwards towards the area to be vapor-deposited are attained.

REFERENCES:
patent: 2996412 (1961-08-01), Alexander et al.
patent: 3117887 (1964-01-01), Shepard et al.
patent: 4089643 (1978-05-01), Jerabek et al.
patent: 4446357 (1984-05-01), Barshter
F. Erhart, "Preferentially Heated Structure (Crucible)", Xerox Disclosure Journal, vol. 1, No. 6, Jun. 1976, US, p. 19.
E.D. Parent, "Bar Sources in Metallizing", Proc. 21st Annual Society of Vacuum Coaters Technical Conference, 1978, pp. 8-18.

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