Vaporized hydrogen silsesquioxane for depositing a coating

Details Vaporized hydrogen silsesquioxane for depositing a coating Vaporized hydrogen silsesquioxane for depositing a coating

1992-04-27

1994-01-18

Brunsman, David

Compositions: coating or plastic

Coating or plastic compositions

Silicon containing other than solely as silicon dioxide or...

10628714, 10628716, 528 31, 423324, 423325, C09D18305

Patent

active

052796612

ABSTRACT:
Compositions suitable for depositing coatings containing silicon and oxygen are disclosed. The compositions contain vaporized hydrogen silsesquioxane in a diluent gas.

REFERENCES:
patent: 3615272 (1971-10-01), Collins et al.
patent: 4756977 (1988-07-01), Haluska et al.
patent: 4808653 (1989-02-01), Haluska et al.
patent: 4898907 (1990-02-01), Haluska et al.
Hawley, ed. Condensed Chemical Dictionary, Van Nostrand Reinhold Co., NY, 1974, 8th ed., p. 410.

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