Vaporization and ionization of metals for use in...

Details Vaporization and ionization of metals for use in... Vaporization and ionization of metals for use in...

2006-08-01

2006-08-01

Lee, John R. (Department: 2881)

Radiant energy

Ion generation

Methods

C250S425000, C250S492210

Reexamination Certificate

active

07084408

ABSTRACT:
Techniques for vaporizing and handling a vaporized metallic element or metallic element salt with a heated inert carrier gas for further processing. The vaporized metallic element or salt is carried by an inert carrier gas heated to the same temperature as the vaporizing temperature to a heated processing chamber. The metal or salt vapor may be ionized (and implanted) or deposited on substrates. Apparatus for accomplishing these techniques, which include carrier gas heating chambers and heated processing chambers are also provided.

REFERENCES:
patent: 3968270 (1976-07-01), Hasegawa
patent: 4229260 (1980-10-01), Johnson et al.
patent: 4617203 (1986-10-01), Jergenson
patent: 4742022 (1988-05-01), Oren et al.
patent: 4833319 (1989-05-01), Knauer
patent: 4911351 (1990-03-01), Ishikawa et al.
patent: 5315121 (1994-05-01), Kluge et al.
patent: 5333495 (1994-08-01), Yamaguchi et al.
patent: 6200397 (2001-03-01), Allen
patent: 6387182 (2002-05-01), Horie et al.
patent: 6416862 (2002-07-01), Kogoi et al.
patent: 2003/0015657 (2003-01-01), Takada et al.

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