Vapor washing process and apparatus

Details Vapor washing process and apparatus Vapor washing process and apparatus

1988-08-09

1992-04-21

Bennet, Henry A.

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

34 73, 134 11, F26B 700

Patent

active

051055562

ABSTRACT:
Vapor is separated from mist accompanying the vapor by passing the vapor through a porous membrane. The vapor having passed through the membrane is brought into contact with an object to be washed and condenses thereon, whereby the object is washed.

REFERENCES:
patent: 3340186 (1967-09-01), Weyl
patent: 3878054 (1975-04-01), Rodgers
patent: 4079522 (1978-03-01), Ham
patent: 4612712 (1986-09-01), Pescatore et al.
patent: 4879041 (1989-11-01), Kurokawa et al.
Moreau et al, Wafer Cleaner System, IBM Technical Disclosure Bulletin vol. 14, No. 10, Mar. 1972.
"Ultra-Pure Water High Purity Chemical Substance Supply System Proceeding" Second Symposium on Ultra LSI Ultra-Clean Technology Symposium No.2, pp. 399-419.

Affiliated with

Also associated with

Rating

Vapor washing process and apparatus does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Vapor washing process and apparatus, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vapor washing process and apparatus will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-1576944