Vapor source assembly with crucible

Details Vapor source assembly with crucible Vapor source assembly with crucible

1988-05-31

1989-09-12

Albritton, C. L.

Electric heating

Metal heating

By arc

373 11, B23K 1500

Patent

active

048662399

ABSTRACT:
A vapor source for the vacuum vaporization of a material which forms a positive meniscus with the wall of a crucible. The source comprises an electron-beam gun and a crucible for containing material to be vaporized. The crucible has a wall which makes an angle greater than about 35 degrees with the vertical; greater than 45.degree. is preferred. A molten pool of material to be vaporized has a positive meniscus which contacts the wall at an angle greater than 90.degree.. The positive meniscus enables a region of the wall just above the meniscus to be kept clear of condensed material. The source includes a means for adding molten material to the molten pool to maintain the meniscus in a desired range. If the pool level is sufficiently well controlled the meniscus can be maintained in the region free of condensed material and thus avoid the onset of a "thermal short".

REFERENCES:
patent: 3710072 (1973-01-01), Shrader et al.
patent: 3883679 (1975-05-01), Shrader et al.
patent: 3896258 (1975-07-01), Hanks
patent: 4728772 (1988-03-01), Smith

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