Vapor source assembly with adjustable magnetic pole pieces

Details Vapor source assembly with adjustable magnetic pole pieces Vapor source assembly with adjustable magnetic pole pieces

1986-07-16

1988-03-01

Albritton, C. L.

Electric heating

Metal heating

By arc

373 14, 373 11, B23K 1500

Patent

active

047287721

ABSTRACT:
An electron-beam heated vapor source for operation in vacuum is disclosed. The source comprises a magnet and a pair of parallel pole plates for deflecting the beam from an electron-beam gun through an angle of approximately 270.degree. into a crucible containing material to be vaporized by evaporation, sublimation or other process. A pole rod extends from each of the pole plates into the space between them. A means is provided for precisely adjusting the distance separating the pole rods while the vapor source is in vacuum. This adjustment enables the impact area of the beam, and thus, the deposition rate or other impact area related parameter to be optimized while the vapor source is in operation. Preferably, each pole rod extends through a clearance hole in the pole plate and the adjustment means comprises a rack integral with the rod and a pinion which can be driven by a control means located outside the vacuum chamber.

REFERENCES:
patent: 3483417 (1967-07-01), Hanks
patent: 3710072 (1973-01-01), Shrader et al.
patent: 4064352 (1977-12-01), Mann
patent: 4131753 (1978-12-01), Tsujimoto et al.
patent: 4429401 (1984-01-01), Avicola
patent: 4620081 (1986-10-01), Zeren
Assembly Drawing and Parts List for STIH-270-1 Electron Beam Source from Temescal Instruction Manual 0101-8051-2, Copyright 1985-The BOC Group, Inc. pp. 15, 55, 141, 143, 145 and 147.

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