Cleaning and liquid contact with solids – Apparatus – Automatic controls
Patent
1995-05-22
1997-11-04
Stinson, Frankie L.
Cleaning and liquid contact with solids
Apparatus
Automatic controls
134105, 134108, 134107, 134200, B08B 310
Patent
active
056829132
ABSTRACT:
A cleaning apparatus for cleaning chemically processed articles between chemical processing steps. The cleaning apparatus includes a sealable pressurization vessel. After a chemical process step, an article, such as a semiconductor wafer is placed in the vessel. The vessel is sealed. Vessel pressure is adjusted. Solvent in the vessel is heated to a boil forming a vapor. Solvent vapor is recondensed by a primary condensing coil. Condensed solvent rains onto the article, washing it. After the article is clean, it is dried when a secondary condensing coil condenses the solvent vapor, causing the distilled solvent to rain into and be collected by a collection tray. Collected solvent is channelled into a storage reservoir. The storage reservoir is sealed after all of the solvent is collected. The vessel is opened to remove the cleaned article.
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Lawson Margaret Jane
Leonard Edward Joseph
Nansen Jon Howard
Ahsan Aziz M.
International Business Machines - Corporation
Peterson Jr. Charles W.
Stinson Frankie L.
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