Vapor phase reactor for making multilayer structures

Details Vapor phase reactor for making multilayer structures Vapor phase reactor for making multilayer structures

1987-08-31

1991-03-05

Bueker, Richard

Coating processes

Coating by vapor, gas, or smoke

118715, 118724, 118725, 118730, C23C 1600

Patent

active

049976770

ABSTRACT:
A gaseous mixture is introduced through a radial inlet into a plenum-like antichamber above a porous diaphragm mounted across the top of a reactor vessel of substantially uniform width. The antichamber and diaphragm are substantially coextensive with the width of the vessel. The diaphragm may form part of a removable cover/diaphragm unit received in a collar-like ring. The substrate holder includes a molybdenum cap and base which fits over a pedestal of refractory material carrying a temperature sensor with an electrical lead extending down the hollow core of a rotatable reactor

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