Vapor-phase axial deposition torch

Details Vapor-phase axial deposition torch Vapor-phase axial deposition torch

1982-04-26

1983-11-29

Kashnikow, Andres

Fluid sprinkling, spraying, and diffusing

Combining of separately supplied fluids

At or beyond outlet

F23D 1336

Patent

active

044176929

ABSTRACT:
A reactant deposition torch (10) has a plurality of concentric glass tubes (16, 18, 20, 24 and 26). Various gases pass through the tubes (18, 20, 24 and 26) while particle producing reactants pass through the inner tube (16). The concentricity of the tubes is accurately maintained by a plurality of precision machined splines located on the outer periphery of the inner and intermediate tubes (16, 18, 20 and 24). Additionally, the inner tube (16) is movable in the axial direction during the deposition process to controllably alter the amount of reactant to be deposited.

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