Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent
1997-10-06
2000-07-11
Gulakowski, Randy
Adhesive bonding and miscellaneous chemical manufacture
Differential fluid etching apparatus
With microwave gas energizing means
118726, C23F 102
Patent
active
060867116
ABSTRACT:
A vapor generation system includes a supply of liquid; an inert gas stream; an aspirator for aspirating the liquid into the gas stream; a heater for heating the gas stream upstream from the aspirator to a temperature such that aspirated liquid is vaporized in the aspirator to form an inert gas and liquid vaporous mixture; and a mixture outlet for flowing the vaporous mixture against a surface of a workpiece. In a particular application a nitrogen gas stream is heated in a heat exchanger and flows through an aspirator/evaporator to vaporize pumped pulses of hydrofluoric acid in the heated flow stream. The resultant vaporous mixture forms a suitable vaporous etchant for removing silicon dioxide contaminates from a conveyor belt which is employed to convey semiconductor wafers through a chemical vapor deposition processing chamber.
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Kanishak Richard A.
Martin Kirk A.
Ahmed Shamim
Gulakowski Randy
Nisene Technology Group
Steuber David E.
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