Vapor drying system and method

Details Vapor drying system and method Vapor drying system and method

1996-12-13

1998-10-06

Capossela, Ronald C.

Drying and gas or vapor contact with solids

Apparatus

With means to treat gas or vapor

34470, F26B 2106

Patent

active

058159428

ABSTRACT:
A vapor drying system includes a tank for holding a drying liquid and a heater for boiling the drying liquid in the tank to produce a vapor. A manifold is arranged in the tank for bubbling gas into the drying liquid. A controller is configured to cause the manifold to bubble gas into the drying liquid at a time when substrates to be dried are first introduced into the tank in order to quench the boiling of the drying liquid and generate a saturated vapor at a rate sufficient to achieve condensation of the drying liquid over substantially the entire surface of each of the substrates to be dried. In this way, staining of the substrates is reduced and process yield is improved.

REFERENCES:
patent: 3483049 (1969-12-01), Grubbe
patent: 4899768 (1990-02-01), Yatabe
patent: 5014727 (1991-05-01), Aigo
patent: 5226242 (1993-07-01), Schwenkler
patent: 5351419 (1994-10-01), Franka et al.
patent: 5369891 (1994-12-01), Kamikawa
patent: 5371950 (1994-12-01), Schumacher
patent: 5539995 (1996-07-01), Bran
patent: 5553395 (1996-09-01), Wen et al.
patent: 5603169 (1997-02-01), Kim

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