Vapor drier

Drying and gas or vapor contact with solids – Apparatus – With means to treat gas or vapor

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Details

34 78, 2101952, F26B 2106

Patent

active

052493717

ABSTRACT:
A purpose of this invention is to provide a vapor drier which can continue a process to dry efficiently objects in an extremely clean condition for a long time. A vapor drier of this invention comprises a circulating/dehydrating/refining means for refining said volatile processing liquid stored in said processing room and circulating refined fluid into said processing room, said circulating/dehydrating/refining means having at least an evaporating section to evaporate said volatile processing liquid stored in said processing room, a dehydrating section to remove water from said vapor generated in said evaporating section with a dehydrating/separating membrane, and a distilling section to distill said dehydrated vapor.

REFERENCES:
patent: 4889642 (1989-12-01), Kaiser
patent: 4996781 (1919-03-01), Mishina et al.
patent: 5105556 (1992-04-01), Kurokawa et al.

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