Coating apparatus – Control means responsive to a randomly occurring sensed... – Condition of coated material
Patent
1984-10-15
1985-10-01
Morgenstern, Norman
Coating apparatus
Control means responsive to a randomly occurring sensed...
Condition of coated material
118720, 118504, 118718, 427 10, C23C 1308
Patent
active
045439109
ABSTRACT:
A vapor deposition apparatus for continuously regulating the deposition thickness from vapor as it is being vacuum deposited across and progressively along one side of a substrate from one or more vapor sources spaced thereacross. The apparatus comprises a central shaft rotatably supporting hollow shafts in end-to-end relation, a series of profile discs on each of the hollow shafts and slidable radially thereon by a slot in each profile disc slidably locating on flats on the hollow shafts. The profile discs are placed between vapor sources, and the substrate moving through a vacuum coating chamber so that the profile discs form a mask controlling the vapor deposition across the substrate. The hollow shafts are coupled to electric motors which may rotate the hollow shafts in response to signals from deposition thickness sensing means.
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Fowler et al., "Apparatus for Evaporating Thin Coatings with In Situ Control of Thickness", IBM Tech. Disclosure Bulletin, vol. 20, No. 7, Dec. 1977, pp. 2876-2877.
Canadian Patents and Development Limited
Lemon Francis W.
Morgenstern Norman
Plantz Bernard F.
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