Stock material or miscellaneous articles – Composite – Of metal
Patent
1987-10-22
1989-02-07
Childs, Sadie
Stock material or miscellaneous articles
Composite
Of metal
427249, 427255, 4272552, 428697, 428698, B32B 1504, B32B 1900
Patent
active
048031275
ABSTRACT:
A process for the chemical vapor deposition on substrates of coatings comprising compounds of a titanium sub-group of metals, the vanadium sub-group of metals and the chromium sub-group of metals at temperatures in the range of 250.degree. C. is disclosed. Sub-halides, such as TiCl.sub.3, are reacted with N.sub.2 and H.sub.2 and thermodynamic and kinetic parameters are manipulated by flow rates and partial pressures of the reactants to achieve the deposition reaction in the temperature range of 250.degree. C. to 850.degree. C. The invention also relates to a metal compound coated article. An apparatus for performing the process is also disclosed.
REFERENCES:
patent: 2962399 (1960-11-01), Ruppert et al.
patent: 3637422 (1972-01-01), Landinham et al.
patent: 3654895 (1972-04-01), Bloom et al.
patent: 3656995 (1972-04-01), Reedy
patent: 3721577 (1973-03-01), Woerner
patent: 3784402 (1974-01-01), Reedy
patent: 3888705 (1975-06-01), Fletcher et al.
patent: 3959557 (1976-05-01), Berry
patent: 4196233 (1980-04-01), Bitzer et al.
patent: 4299861 (1981-11-01), Dietrich et al.
Chemical Abstracts, vol. 98, No. 6, 1983, "Reaction Process of Vanadium Tetrachloride with Ammonia in the Vapor Phase and Properties of the Vanadium Nitride Formed", p. 698.
Patent Abstracts of Japan, vol. 7, No. 276(E-215) [1421], Dec. 9, 1983, p. 698, No. 45729j.
Chemical Abstracts, vol. 94, No. 13, Jun. 1981, p. 247, No. 212559e.
Cho et al., "Study of Growth Rate & Failure Mode of Chemically Vapour Deposited TiN, TiC.sub.x N.sub.y & TiC Cemented Tungsten Carbide", Journal of Materials Science 17(1982), pp. 2495-2502.
Takahashi et al, "TiC.sub.x N.sub.y & TiC.sub.x -TiN Films Obtained by CVD in an Ultrasonic Field", J. of Materials Science 14(1979), pp. 1285-1290.
Podob, "CVD Hard Coatings Lengthen Tool Life", Metal Progress, pp. 50-52, May, 1982.
Childs Sadie
Liburdi Engineering Limited
LandOfFree
Vapor deposition of metal compound coating utilizing metal sub-h does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Vapor deposition of metal compound coating utilizing metal sub-h, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Vapor deposition of metal compound coating utilizing metal sub-h will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-1084301