Vapor deposition of ceramic materials

Details Vapor deposition of ceramic materials Vapor deposition of ceramic materials

1993-09-10

1995-05-23

King, Roy V.

Coating processes

Electrical product produced

Metallic compound coating

4271263, 4271261, 427566, C23C 1424, B05D 306

Patent

active

054180031

ABSTRACT:
Evaporated ceramic coatings are prepared by furnishing an ingot of a ceramic material, treating the ingot to reduce sources of gas within the ingot, and evaporating the ceramic material in the ingot by melting the surface of the ingot with an intense heat source. The evaporated ceramic is deposited upon a substrate as the ceramic coating. The reduced gas content of the ingot decreases the incidence of spitting and eruptions from the molten surface of the ingot, thereby improving the quality of the deposited coating, and facilitating increases in evaporation rates and coatings process production rates.

REFERENCES:
patent: 4379832 (1983-04-01), Dalal et al.
patent: 4838935 (1989-06-01), Dunlop et al.
patent: 4938798 (1990-07-01), Chiba et al.
patent: 5055246 (1991-10-01), Jalby et al.
"Encyclopedia of Chemical Technology" by Kirk-Othmer, third edition, vol. 20 pp. 42 and 43 (1982).
"Thin Film Microelectronics" edited by L. Holland, pp. 114 and 189 (1969).

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