Coating apparatus – With vacuum or fluid pressure chamber
Patent
1975-05-05
1977-04-05
Kaplan, Morris
Coating apparatus
With vacuum or fluid pressure chamber
118 7, 118 491, 118 64, 118620, C23C 1310
Patent
active
040155587
ABSTRACT:
Multi-layer coating apparatus and system for coating a substrate having a coating chamber and means for advancing the substrate in a horizontal position through the coating chamber. The coating chamber is provided with means for depositing the coating on the bottom side of the substrate as it is advanced through the chamber. Means is provided for preventing one substrate from bumping into another and for providing a predetermined spacing from the substrates as they are advanced through the coating chamber.
REFERENCES:
patent: 2671034 (1954-03-01), Steinfeld
patent: 2975753 (1961-03-01), Hayes
patent: 2997979 (1961-08-01), Tassara
patent: 3294670 (1966-12-01), Charschan et al.
patent: 3469560 (1969-09-01), Bukkila et al.
patent: 3495724 (1970-02-01), Beckham et al.
patent: 3568632 (1971-03-01), Cawthon
IBM Technical Disclosure Bulletin, Barber, "Two Chamber Air-to-Vacuum Lock System", vol. 11, No. 7 (Dec. 1968) pp. 757, 758.
Bergfelt Nils H.
Clary Robert M.
Edwards Richard H.
Eufusia Eugene A.
Small Edward A.
Kaplan Morris
Optical Coating Laboratory, Inc.
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