Vapor deposited film, and a geometry measuring method, productio

Coating processes – Measuring – testing – or indicating – Thickness or uniformity of thickness determined

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Details

4272481, 118665, 118708, 118712, 118715, G23C 1400

Patent

active

055957811

ABSTRACT:
Methods and apparatuses for measuring and controlling the edge positions of a vapor deposited film, and the positions and widths of vapor deposited zones and margin zones of the film, and also the positions of heavy edges, if any, without requiring a skilled operator, are provided. A vapor deposited film on which vapor deposited zones and margin zones are formed in stripes in the longitudinal direction and alternately in the transversal directly by a margin forming device and a metal evaporator is carried by a film carrier system, while being illuminating with the light emitted from a light source, and the light transmittance distribution of the film in the transversal direction of the film is detected by a line sensor camera, to be used for measuring the edge positions of the film, and the positions and widths of the vapor deposited zones and the margin zones, and also the positions of the heavy edges, and for controlling the margin forming device, the metal evaporator, etc. based on the results of measurement.

REFERENCES:
patent: 5230923 (1993-07-01), Hirokawa

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