Vapor delivery system and method of maintaining a constant level

Gas and liquid contact apparatus – Contact devices – Liquid tank

Patent

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Details

137209, 137386, 137392, B01F 304

Patent

active

042358299

ABSTRACT:
A vapor delivery system is disclosed comprising a bubbler 12 is adapted to generate and deliver vapors from a vaporizable liquid contained therein, and a reservoir 30 in fluid communication with the bubbler 12 from which liquid may be continuously fed into the bubbler to replenish liquid vaporized within and withdrawn from the bubbler. The system further comprises means for sensing the level of vaporizable liquid in the bubbler and means for providing a gaseous head pressure in the reservoir of variable magnitude dependent upon the level of vaporizable liquid sensed by the sensing means to maintain the level of liquid in the bubbler substantially constant.

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