Vapor delivery system and method

Glass manufacturing – Processes – Forming product or preform from molten glass

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Details

48191, 65 13, 65 18, 73204, 137 90, 261 39E, C03C 2502, C03B 3700

Patent

active

042204607

ABSTRACT:
A system for generating and delivering vapors to a vapor deposition station is disclosed which comprises a bubbler 10 adapted to contain a supply of liquid, a bubbler heater 14 thermally coupled with the bubbler and electrically coupled with a heater controller, a temperature controlled chamber 23 located above the bubbler, and means 58,59 for heating the space within the temperature controlled chamber. A carrier gas intake conduit 27,28 extends through the temperature controlled chamber and down into the bubbler through which carrier gas may be introduced into the bubbler. A vapor exhaust conduit 41,49 extends upwardly from the bubbler and through the temperature controlled chamber through which vapors may be carried from the bubbler entrained with the carrier gas to the vapor deposition station. A sensor 52 is positioned within that portion of the vapor exhaust conduit located within the temperature controlled chamber and operatively coupled with the bubbler heater controller.

REFERENCES:
patent: 3771260 (1973-11-01), Arenson
patent: 3826560 (1974-07-01), Schultz
patent: 3859073 (1975-01-01), Schultz
patent: 3938384 (1976-02-01), Blair
patent: 3939858 (1976-02-01), Lemay
patent: 4111219 (1978-09-01), Hallberg et al.

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