Electric resistance heating devices – Heating devices – Vaporizer
Reexamination Certificate
2005-05-17
2005-05-17
Campbell, Thor (Department: 3742)
Electric resistance heating devices
Heating devices
Vaporizer
C392S403000
Reexamination Certificate
active
06895178
ABSTRACT:
The present invention provides a vapor delivery system and method for efficiently producing water vapor on demand. More particularly, the present invention produces low-temperature water vapor, without the formation of ice, by maintaining a sufficient volume of water at a sufficient temperature within a vaporizer chamber when the pressure in the vaporizer chamber is lowered.
REFERENCES:
patent: 5630913 (1997-05-01), Tajer-Ardebili
patent: 1 047 113 (2000-10-01), None
patent: WO 0112300 (2001-02-01), None
MKS Instruments, “Vapor on Demand Module” Bulletin, 4 pages.
Dozoretz Paul
Goss Benjamin
Gu Youfan
Higgins Donald W.
Mueller James
Campbell Thor
Cochran Freund & Young
MKS Instruments Inc.
Young James R.
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