Vapor controller

Details Vapor controller Vapor controller

1995-02-13

1996-05-28

Capossela, Ronald C.

Refrigeration

Storage of solidified or liquified gas

Liquified gas transferred as liquid

62 507, F17C 902

Patent

active

055200010

ABSTRACT:
A vapor controller capable of reducing a thermal influence upon a liquid material to be vaporized as far as possible and always stably controlling a vaporized gas in flow rate in high-speed response and a vapor controller having a vaporizer capable of improving a purge efficiency are provided. A vapor controller in which a vaporizer covered with a diaphragm is formed in a body block including a heater and a temperature sensor while a liquid material inlet passage and a gas outlet passage is formed within said body block so as to be opened on an end face of the body block at one end thereof, respectively, and communicated with said vaporizing chamber at the other end thereof, respectively, said diaphragm being driven by a pressedly driving portion provided in the body block to adjust an openness of an opening facing to the vaporizing chamber of said liquid material inlet passage, said liquid material introduced into the vaporizing chamber through the liquid material inlet passage being vaporized within the vaporizing chamber, and a gas generated by a vaporization being discharged through said gas outlet passage.

REFERENCES:
patent: 3950959 (1976-04-01), Coureau
patent: 4220312 (1980-09-01), Pauliukonis
patent: 5031408 (1991-07-01), Horne et al.
patent: 5272880 (1993-12-01), Nishizato et al.

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