Vapor composition and flow sensor

Measuring and testing – Gas analysis – By thermal property

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Details

7320426, 7320418, G01N 2500, G01F 1684

Patent

active

055157149

ABSTRACT:
The present invention is directed to a single solid state thermal diffusion sensor capable of measuring both the composition and flow of gaseous vapors traveling through a duct. The sensor comprises two orthogonal sensing patterns, each having a heating element positioned equidistant between two thermistor elements. The heaters and thermistors are made from thin film platinum deposited on a thermally insulating polyimide layer having low thermal diffusivity. A sinusoidal voltage is applied to each heating element for generating oscillating thermal waves which propagate through the gaseous vapor to their respective thermistors. The thermistors of a first, transversely positioned sensing pattern are responsive to both the composition and flow of the gaseous vapor, while the thermistors of a second, longitudinally positioned sensing pattern are responsive only to the composition of the gaseous vapor. Appropriate electronic circuitry utilizes the responses of the thermistor pairs for determining the composition and flow of the gaseous vapor.

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