Valve with an integral orifice

Valves and valve actuation – With material guide or restrictor

Reexamination Certificate

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Details

C251S331000

Reexamination Certificate

active

07150444

ABSTRACT:
A valve with an integral orifice for use in gas feeding equipment provided with a pressure-type flow volume control device to be employed for manufacturing of semi-conductors and chemical goods. The valve with an integral orifice has the excellent flow rate control characteristics by improving the processing accuracy of the orifice and preventing the distortion of the orifice at the time of assembling. The orifice is formed in a stainless steel made orifice disc. The metal-made orifice disc with the orifice formed by separate processing and the synthetic-resin-made valve seat body are removably assembled, wherein the orifice disc and the synthetic resin made valve seat body are fixed airtight to the valve main body by pressing the valve seat body via a metal inner disc.

REFERENCES:
patent: 3833015 (1974-09-01), Kneuer
patent: 3870077 (1975-03-01), Nakamura
patent: 4073311 (1978-02-01), McGeachy
patent: 4643359 (1987-02-01), Casey
patent: 4650155 (1987-03-01), Liantonio
patent: 4969629 (1990-11-01), Athanassiu
patent: 5301712 (1994-04-01), Treichel et al.
patent: 5524865 (1996-06-01), Uchisawa et al.
patent: 5855355 (1999-01-01), Grunert et al.
patent: 6027037 (2000-02-01), Murakami et al.
patent: 6357677 (2002-03-01), Ren et al.
patent: 56-42767 (1981-10-01), None
patent: 62-161050 (1987-07-01), None
patent: 63-96367 (1988-04-01), None
patent: 63-96369 (1988-04-01), None
patent: 3-33566 (1991-02-01), None
patent: 7-139649 (1995-05-01), None
patent: 3029515 (1996-10-01), None
patent: 10-332003 (1998-12-01), None
patent: 11-166636 (1999-06-01), None
patent: WO99/63412 (1999-12-01), None
International Search Report, completed Jul. 28, 2000.

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